Nano 3D Optical Surface Profilometers SuperView W1-Lite
  • Model No.: SuperView W1-Lite
    Product name: Nano 3D Optical Surface Profilometers
  • Standard field of view: (0.98*0.98)mm
    Max field of view: (6x6)mm
    Reflectivity of test object: 0.05 % ~100 %
    Repeatability of Roughness RMS: 0.01nm
    Scanning range: ≤10mm
    Resolution: 0.1nm
    Accuracy of stage measurement: 0.3 %
    Repeatability of stage measurement: 0.08% 1σ

 

details

Description

SuperView W1-Lite Optical 3D Surface profilometer is an ideal instrument for sub-Nanometer measurement of various precision parts. Based on the principle of white light interference technology, combined with precision Z-direction scanning module and 3D modeling algorithm, it contactlessly scans the surface of the object then establish a 3D image for the surface. A serial of 2D, 3D parameters  reflecting surface quality of the object are obtained after XtremeVision software processes and analyzes the 3D image.   The SuperView W1 is a user-friendly precision optical instrument with powerful analysis functions for all kinds of surface form & roughness parameters. With unique light source it could measure various precision parts with both smooth and rough surface.  

Parameters

Model No.*1 W1-Ultra W1-Lite
Light source White LED
Video system 1024×1024
Objective Lens Standard: 10X(Optional: 2.5X, 5X, 20X, 50X, 100X)
Optical Zoom Standard: 0.5X
Optional: 0.375X, 0.75X,1X
Standard: 0.5X
Optional: 0.375X, 0.75X
Standard Field of View 0.98×0.98 mm
Lens Turret  Standard:  Manual 3 holes turret(Optional:  Motorized 5 holes turret)
XY Object table Size 320x200mm 220x220mm
Moving range 140x100mm 100x100mm
Loading capacity 10kg
Control method Motorized
Tilt ±3°
Z Axis focusing Travel range 50mm
Control method Motorized
Z Stroke Scanning Range 10mm
Surface Form Repeatability*2 0.1nm
Roughness RMS Repeatability*3 0.005nm
Step Height Measurementy*4 Accuracy: 0.3%; Repeatability: 0.08%(1σ) Accuracy: 0.5%
Repeatability: 0.1%(1σ)
Scanning Speed@0.1nm resolution 8μm/s 1.85μm/s
Reflectivity of Test object 0.05% ~100%
Weight <160KG 50kg
Size(L*W*H) 700x606x920mm 440x660x700mm
Stage measurement Temperature 15°C~30°C, fuctuation <1°C/15min
Humidity  5%~95% RH, no condensation
Vibration VC-C or better
Software
Noise Evaluation*5
3σ≤4nm
Compressed Air 0.6Mpa oil-free, water-free, 6mm diameter of hose
Power Supply AC100~240V, 50/60Hz, 4A, 300W
Other No strong magnetic field, No corrosive gas
*1 W1 is the standard model of 3D Optical Surface Profilometer; W1-pro has larger stage size and travel range.
W1-Ultra has greatly improved the scanning speed compared to W1.
*2 Use EPSl mode to measure Sa 0.2nm silicon wafer in the laboratory environment; Single stripe, 80um filter for full field of view
*3 Measure Sa 0.2nm silicon wafer in a laboratory environment according to the ISO 25178.
*4 Measure standard 4.7μm steps height block in a laboratory environment according to the ISO 5436-1:2000
*5 When the software noise evaluation is 4nm≤3σ≤10nm, the Roughness RMS repeatability is revised down to 0.015nm, the Step height measurement accuracy is revised down to 0.7%, and the step height measurement repeatability is revised down to 0.12%; When the software noise evaluation is 3σ>10nm, the environment does not meet the requirement for usage of the equipment, and need to change the site.

Remark: Performance parameters are tested by using a 4.7µm precision master stage gauge in lab according to ISO 4287 and ISO 25178.

Standard Parameters
ISO 4287-1997   P>rincipal section Roughness W>aviness
A>mplitude Pp, Pv ,Pz, Pc, Pt,Pa,Pq,Psk,Pku Rp, Rv ,Rz, Rc, Rt,Ra,Rq,Rsk,Rku Wp, Wv ,Wz, Wc, Wt,Wa,Wq,Wsk,Wku
interval PSm,Pdq RSm,Rdq WSm,Wdq
S>ubstance Pmr,Pdc Rmr,Rdc,Rmr(Rz/4) Wmr,Wdc,Wmr(Wz/4)
Peak PPc RPc WPc
ISO 13565 ISO 13565-2 Rk,Rpk,Rvk,Mr1,Mr2,A1,A2,Rpk,Rvk
ISO 12085 Roughness graph R,AR,R× ,Nr
W>aviness> graph W,AW,W×,Wte
Other graph Rke,Rpke,Rvke
AMSE >B46.1  2D Rt,Rp,Rv,Rz,Rpm,Rma×,Ra,Rq,Rsk,Rku,tp,Htp,Pc,Rda,Rdq,RSm,Wt
DIN EN ISO 4287-2010 Original profile Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,
Roughness Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,RPc,Rdq,Rdc,Rmr,
W>aviness Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr
JIS B0601-2013 Original profile Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,
Roughness Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr
W>aviness Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr
GBT 3505-2009 Original profile Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,
Roughness Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr
W>aviness Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr

※ Built-in ISO/ASME/EUR/GBT Standards of 2D, 3D parameters: 

2D Parameters

Standard Parameters
ISO 4287-1997   P>rincipal section Roughness W>aviness
A>mplitude Pp, Pv ,Pz, Pc, Pt,Pa,Pq,Psk,Pku Rp, Rv ,Rz, Rc, Rt,Ra,Rq,Rsk,Rku Wp, Wv ,Wz, Wc, Wt,Wa,Wq,Wsk,Wku
interval PSm,Pdq RSm,Rdq WSm,Wdq
S>ubstance Pmr,Pdc Rmr,Rdc,Rmr(Rz/4) Wmr,Wdc,Wmr(Wz/4)
Peak PPc RPc WPc
ISO 13565 ISO 13565-2 Rk,Rpk,Rvk,Mr1,Mr2,A1,A2,Rpk,Rvk
ISO 12085 Roughness graph R,AR,R× ,Nr
W>aviness> graph W,AW,W×,Wte
Other graph Rke,Rpke,Rvke
AMSE >B46.1  2D Rt,Rp,Rv,Rz,Rpm,Rma×,Ra,Rq,Rsk,Rku,tp,Htp,Pc,Rda,Rdq,RSm,Wt
DIN EN ISO 4287-2010 Original profile Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,
Roughness Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,RPc,Rdq,Rdc,Rmr,
W>aviness Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr
JIS B0601-2013 Original profile Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,
Roughness Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr
W>aviness Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr
GBT 3505-2009 Original profile Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,
Roughness Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr
W>aviness Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr

3D Parameters

Standard Parameters
ISO 25178 Height Sq,Ssk,Sku,Sp,Sv,Sz,Sa
function Smr,Smc,S×p
Space Sal,Str,Std
Composite parameters Sdq,Sdr
Volume Vm,Vv,Vmp,Vmc,Vvc,Vvv
Form Spd,Spc,S10z,S5p,S5v,Sda,Sha,Sdv,Shv
Functional Sk,Spk,Svk,Smr1,Smr2,Spq,Svq,Smq
ISO 12781 Flatness FLTt,FLTp,FLTv,FLTq
EUR 15178N Amplitude Sa,Sq,Sz,Ssk,Sku,Sp,Sv,St
Space Str,Std,Sal
Composite parameters Sdq,Sds,Ssc,Sdr,Sfd
Area, Volume Smr,Sdc
Function Sk,Spk,Svk,Sr1,Sr2,Spq,Svq,Smq
Functional Sbi,Sci,Svi
EUR 16145 EN Amplitude SaSq,Sy,Sz,Ssk,Sku
Mixed parameters Ssc,Sdq
Functional Sbi,Sci
Space Sdsrw
Hardness Hs,Hvol
ASME B46.1 3D St,Sp,Sv,Sq,Sa,Ssk,Sku,SWt

Applications

It is used for measurement and analysis of surface roughness and profile of precision components from industries of semi-conductor, 3C Electronics, ultraprecise machining, optical machining, micro-nano materials, micro-electro-mechanical system.

Measurement and analysis for various products, components and materials`surface form and profile characteristics, such as flatness, roughness, waviness, appearance, surface defect, abrasion,corrosion, gap, hole, stage, curvature, deformation, etc.

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