SuperView WX100 White Light Interferometry Probe

Measurement function: it can realize high precision Z scanning of sample surface and obtain 3D image.
Analysis function: It can obtain 2D and 3D data such as surface roughness, micro-nano-level contour size, etc.
Programming function: Support pre-configured data processing and analysis tool steps, one-click to complete the whole process from measurement to analysis.
Batch analysis: Data processing and analysis templates can be customized according to the customer demands, and one-click batch analysis can be realized for the same type of parameter data

Semiconductor, polished silicon wafer, thin silicon wafer, wafer IC

3C electronics, sapphire glass roughness, metal shell mold defects, glass screen height difference

Model No.		SuperView WX100
Light Source		White LED
Video System		1024×1024
Objective Lens		10×( 20×,50×)
F.O.V		0.98×0.98mm
Lens Turret		Single hole
Size		230×200×380mm
Tilt		±2° Motorized
Z Travel Range		30mm
Z Scanning Range		10mm(Depend on Lens)
Z Resolution		0.1nm
Reflectivity of Test Object		0.05%~100%
Roughness RMS Repeatability*1		0.01nm
Step Height Measurement	Accuracy*2	0.50%
	Repeatability*2	0.1% 1σ
1 Measure Sa 0.2nm silicon wafer in a laboratory environment according to the ISO 25178. 2 Measure standard 4.7μm steps height block in a laboratory environment according to the ISO 5436-1:2000