Nano 3D Optical Surface Profilometers SuperView W3

Model No.: SuperView W3
Product name: Nano 3D Optical Surface Profilometers
Standard field of view: (0.98*0.98)mm

Max field of view: (6x6)mm

Reflectivity of test object: 0.5 % ~100 %

Repeatability of Roughness RMS: 0.005nm

Scanning range: ≤10mm

Resolution: 0.1nm

Accuracy of stage measurement: 0.3 %

Repeatability of stage measurement: 0.08% 1σ

details

Dedicated Functions for Semiconductor Field

Measure profile trenches after laser grooving in the dicing process.
Measure film step-height of wafer ranging from 1nm~1mm.
Measure roughness of silicon cut sheet after grinding process, and can measure
dozens of small areas to obtain the average value by one click.
Support 6", 8" and 12" wafer measurement, and easy switch between 3 sizes of
vacuum chucks by one click automatically.

Description

SuperView W3 Optical 3D Surface profilometer is an ideal instrument for sub-Nanometer measurement of various precision parts. Based on the principle of white light interference technology, combined with precision Z-direction scanning module and 3D modeling algorithm, it contactlessly scans the surface of the object then establish a 3D image for the surface. A serial of 2D, 3D parameters reflecting surface quality of the object are obtained after XtremeVision software processes and analyzes the 3D image. The SuperView W3 is a user-friendly precision optical instrument with powerful analysis functions for all kinds of surface form & roughness parameters. With unique light source it could measure various precision parts with both smooth and rough surface.

Parameters

Model No.		SuperView W3
Size		10009001500mm
Weight		500 kg
Light source		White LED
Video system		1024×1024
Objective Lens		10x,(2.5x,5x,20x,50x,100x)
Optical Zoom		0.5x,(0.75x,1x,0.375x)
Standard Field of View		0.98×0.98 mm
Lens Turret		Motorized 5 holes-turret
XY Object table	Size	450×450mm
	Travel Range	300×300mm
	Loading Capacity	10kg
	Control method	Motorized
Tilt		±6° Motorized
Z Axis	Travel Range	100mm
	Control Method	Motorized
Z-Stoke Scanning Range		10mm
Z Resolution		0.1nm
Reflectivity of Object		0.05%~100%
Roughness RMS Repeatability ^*1		0.05%~100%
Stage Height Measurement	Accruacy ^*2	0.3%
	Repeatability ^*2	0.08% 1σ
Enviromental Requirement
1	Operating environment: No strong magnetic field	4	Environmental vibration: VC-C or better
2	Working temperature: 15°C~30°C fluctuation <2℃/60min	5	Compressed air: 0.6Mpa oil-free, water-free
3	Relative humidity: 5%~95% RH, no condensation	6	Power: 600W

Remark:
*1 Measure Sa 0.2nm silicon wafer in a laboratory environment according to the ISO 25178
*2 Measure standard 4.7μm steps height block in a laboratory environment according to the ISO 5436-1:2000

Applications

It is used for measurement and analysis of surface roughness and profile of precision components from industries of semi-conductor, 3C Electronics, ultraprecise machining, optical machining, micro-nano materials, micro-electro-mechanical system.

Measurement and analysis for various products, components and materials`surface form and profile characteristics, such as flatness, roughness, waviness, appearance, surface defect, abrasion,corrosion, gap, hole, stage, curvature, deformation, etc.