Microscopic measuring machine MX3200 achieves wide-range measurement of tiny features by combining microscopic imaging with traditional video measurement. Equipped with a motorized turret, it can measure various microscopic 2D sizes by switching different lens, including points, lines, circles and geometric tolerances, etc.
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Model No.
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MX3200 | |||
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Objective Lens
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10× | 20× | 50× | |
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Image Senor
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Industrial Camera | |||
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Monitor
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24" LCD (XGA: 1920x1080) | |||
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Lens Turret
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3 Holes Manual(Optional: 5 holes motorized) | |||
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Single F.O.V.
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0.98×0.98mm | 0.49×0.49mm | 0.196×0.196mm | |
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Lateral Resolution*1
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2μm | 1μm | 0.4μm | |
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Accuracy*2
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Single F.O.V.
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0.4μm | ±0.2μm | ±0.1μm |
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Motion Axis Ex/Ey
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±（ 2.0+0.02 L ）μm | |||
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Repeatability in Single F.O.V. *3
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±0.1μm | ±0.1μm | ±0.05μm | |
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Height Meas.*4
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Accuracy
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±(3.0+L/100)μm | ||
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Repeatability
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±1μm | |||
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Travel range
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X
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210mm | ||
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Y
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110mm | |||
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Z
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75mm | |||
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Resolution of Glass Scale
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0.1μm | |||
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Light
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Surface Light
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Coaxial light | ||
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Back Light
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Telecentric transmission illumination(Green Light) | |||
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Height Meas.
(Optical Probe) (Optional) |
Max Hole/Depth Ratio(h/Φ)
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1.64 | ||
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Range(Z)
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±2mm | |||
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Accuracy
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±2.0μm | |||
| Software | VisionX | |||
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Max Measurement Speed |
XY | 80 mm/s | ||
| Z | 25 mm/s | |||
| Size(LxWxH) | 531x455x761mm | |||
| Weight | 74kg | |||
| Loading Capacity | 5kg | |||
| Power Supply | AC100~240V,50/60Hz,2A Power 300W | |||
| Working Environment | Temp.10°C~35°C, Humidity 20~80%, Vibration<0.002g, Less than15Hz | |||
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*1 In the focus position, measure resolution panel when the environment temperature is +20 °C ± 1.0 °C. *2 In the focus position, measure Micro-Nano standard specimen when the environment temperature is +20 °C ± 1.0 °C. *3 In the focus position, measure Micro-Nano standard specimen when the environment temperature is +20 °C ± 1.0 °C. *4 It is the Z-axis mechanical accuracy, and the accuracy of actual height measurement by focusing depends on the surface of the workpiece. |
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