Microscopic measuring machine MX3200 achieves wide-range measurement of tiny features by combining microscopic imaging with traditional video measurement. Equipped with a motorized turret, it can measure various microscopic 2D sizes by switching different lens, including points, lines, circles and geometric tolerances, etc.
| Model No. | MX3200 | |||
| Objective Lens | 10X | 20X | 50X | |
| Image Senor | Industrial Colorful Camera | |||
| Monitor | 24" LCD (XGA: 1920x1080) | |||
| Lens Turret | 3 Holes Manual(Optional: 5 holes motorized) | |||
| Single F.O.V. | 0.98×0.98mm | 0.49×0.49mm | 0.196×0.196mm | |
| Lateral Resolution*1 | 2μm | 1μm | 0.4μm | |
| Accuracy*2 | Single F.O.V. | ±0.3μm | ±0.2μm | ±0.1μm |
| Motion Axis Ex/Ey | ±（ 2.0+0.02 L ）μm | |||
| Repeatability in Single F.O.V. *3 | ±0.1μm | ±0.1μm | ±0.05μm | |
| Height Meas.*4 | Accuracy | ±(3.0+L/100)μm | ||
| Repeatability | ±1μm | |||
| Travel range | X | 210mm | ||
| Y | 110mm | |||
| Z | 75mm | |||
| Resolution of Glass Scale | 0.1μm | |||
| Light | Surface Light | Coaxial light | ||
| Back Light | Telecentric transmission illumination(Green Light) | |||
|
Height Meas. (Optical Probe) (Optional) |
Max Hole/Depth Ratio(H/Φ) | 1.5 | ||
| Range(Z) | ±3mm | |||
| Accuracy | ±2.0μm | |||
| Software | VisionX | |||
|
Max Measurement Speed |
XY | 80mm/s | ||
| Z | 25mm/s | |||
| Size(LxWxH) | 531x455x761mm | |||
| Weight | 74kg | |||
| Loading Capacity | 5kg | |||
| Power Supply | AC100~240V,50/60Hz, 300W | |||
| Working Environment | Temp.20°C±2°C, Humidity 20~80%, Vibration<0.002g, Less than 15Hz | |||
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Note: *1 In the focus position, measure resolution panel when the environment temperature is +20 °C ± 1.0 °C. *2 In the focus position, measure Micro-Nano standard specimen when the environment temperature is +20 °C ± 1.0 °C. *3 In the focus position, measure Micro-Nano standard specimen when the environment temperature is +20 °C ± 1.0 °C. *4 It is the Z-axis mechanical accuracy, and the accuracy of actual height measurement by focusing depends on the surface of the workpiece. |
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