Nano 3D Optical Surface Profilometers SuperView W1

Model No.: SuperView W1/W1-Pro

Product name: Nano 3D Optical Surface Profilometers
Standard field of view: (0.98*0.98)mm

Max field of view: (6x6)mm

Reflectivity of test object: 0.5 % ~100 %

Repeatability of Roughness RMS: 0.005nm

Scanning range: ≤10mm

Resolution: 0.1nm

Accuracy of stage measurement: 0.3 %

Repeatability of stage measurement: 0.08% 1σ

details

§≡≡≡≡ Description ≡≡≡≡

SuperView W1 Optical 3D Surface profilometer is an ideal instrument for sub-Nanometer measurement of various precision parts. Based on the principle of white light interference technology, combined with precision Z-direction scanning module and 3D modeling algorithm, it contactlessly scans the surface of the object then establish a 3D image for the surface. A serial of 2D, 3D parameters reflecting surface quality of the object are obtained after XtremeVision software processes and analyzes the 3D image.

The SuperView W1 is a user-friendly precision optical instrument with powerful analysis functions for all kinds of surface form & roughness parameters. With unique light source it could measure various precision parts with both smooth and rough surface.

§≡≡≡≡ Parameters ≡≡≡≡

Model No.		SuperView W1	SuperView W1-Pro
Light source		Green LED
Video system		1024×1024
Standard Field of View		0.98×0.98 mm
Max Field of View		6.0×6.0 mm(Optional)
Lens holder		3 holes-manual
XY Object table	Size	320×200mm	300×300mm
	Moving range	140×100mm	200×200mm
	Loading capacity	10kg
	Control method	Motorized
	Tilt	±5°Manual
Z Axis focusing	Moving range	100mm
	Control method	Motorized
Max scanning speed		45µm/s
Scanning range of Z axis		10mm
Resolution of Z axis		0.1nm
Lateral Resolution		0.1μm
Stage measurement	Uncertainty	0.3%
	Repeatability	0.08% 1σ
Size		L900W700H604mm	L900W700H700mm
Weight		<150KG	<160KG
Power		AC100~240V, 50/60Hz, 4A, 300W

Remark: Performance parameters are tested by using a 4.7µm precision master stage gauge in lab according to ISO 4287 and ISO 25178.

Zoom ratio of lens			2.5×	5×	10×	20×	50×	100×
Numerical hole diameter			0.075	0.13	0.3	0.4	0.55	0.7
Optical resolution @550nm(µm)			3.7	2.1	0.92	0.69	0.5	0.4
Depth of focus(µm)			48.6	16.2	3.04	1.71	0.9	0.56
Working distance(mm)			10.3	9.3	7.4	4.7	3.4	2.0
Field H×V (mm)	Video system 1024×1024	0.5×	3.92×3.92	1.96×1.96	0.98×0.98	0.49×0.49	0.196×0.196	0.098×0.098
		0.75×	2.6×2.6	1.3×1.3	0.65×0.65	0.325×0.325	0.13×0.13	0.065×0.065
		1×	1.96×1.96	0.98×0.98	0.49×0.49	0.245×0.245	0.098×0.098	0.049×0.049

※ Built-in ISO/ASME/EUR/GBT Standards of 2D, 3D parameters:

2D Parameters

Standard	Parameters
ISO 4287-1997		Principal section	Roughness	Waviness
	Amplitude	Pp, Pv ,Pz, Pc, Pt,Pa,Pq,Psk,Pku	Rp, Rv ,Rz, Rc, Rt,Ra,Rq,Rsk,Rku	Wp, Wv ,Wz, Wc, Wt,Wa,Wq,Wsk,Wku
	interval	PSm,Pdq	RSm,Rdq	WSm,Wdq
	Substance	Pmr,Pdc	Rmr,Rdc,Rmr(Rz/4)	Wmr,Wdc,Wmr(Wz/4)
	Peak	PPc	RPc	WPc
ISO 13565	ISO 13565-2	Rk,Rpk,Rvk,Mr1,Mr2,A1,A2,Rpk,Rvk
ISO 12085	Roughness graph	R,AR,R× ,Nr
	Waviness graph	W,AW,W×,Wte
	Other graph	Rke,Rpke,Rvke
AMSE B46.1	2D	Rt,Rp,Rv,Rz,Rpm,Rma×,Ra,Rq,Rsk,Rku,tp,Htp,Pc,Rda,Rdq,RSm,Wt
DIN EN ISO 4287-2010	Original profile	Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,
	Roughness	Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,RPc,Rdq,Rdc,Rmr,
	Waviness	Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr
JIS B0601-2013	Original profile	Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,
	Roughness	Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr
	Waviness	Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr
GBT 3505-2009	Original profile	Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,
	Roughness	Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr
	Waviness	Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr

3D Parameters

Standard	Parameters
ISO 25178	Height	Sq,Ssk,Sku,Sp,Sv,Sz,Sa
	function	Smr,Smc,S×p
	Space	Sal,Str,Std
	Composite parameters	Sdq,Sdr
	Volume	Vm,Vv,Vmp,Vmc,Vvc,Vvv
	Form	Spd,Spc,S10z,S5p,S5v,Sda,Sha,Sdv,Shv
	Functional	Sk,Spk,Svk,Smr1,Smr2,Spq,Svq,Smq
ISO 12781	Flatness	FLTt,FLTp,FLTv,FLTq
EUR 15178N	Amplitude	Sa,Sq,Sz,Ssk,Sku,Sp,Sv,St
	Space	Str,Std,Sal
	Composite parameters	Sdq,Sds,Ssc,Sdr,Sfd
	Area, Volume	Smr,Sdc
	Function	Sk,Spk,Svk,Sr1,Sr2,Spq,Svq,Smq
	Functional	Sbi,Sci,Svi
EUR 16145 EN	Amplitude	Sa,Sq,Sy,Sz,Ssk,Sku
	Mixed parameters	Ssc,Sdq,Sdr
	Functional	Sbi,Sci,Svi,Sk,Spk,Svk
	Space	Sds,Std,Stdi,Srw,Srwi
	Hardness	Hs,Hvol,Hv,Hps,Hpvol,Hpv,Hap,Hbp
ASME B46.1	3D	St,Sp,Sv,Sq,Sa,Ssk,Sku,SWt

§≡≡≡≡ Applications ≡≡≡≡

It is used for measurement and analysis of surface roughness and profile of precision components from industries of semi-conductor, 3C Electronics, ultraprecise machining, optical machining, micro-nano materials, micro-electro-mechanical system.

Measurement and analysis for various products, components and materials`surface form and profile characteristics, such as flatness, roughness, waviness, appearance, surface defect, abrasion,corrosion, gap, hole, stage, curvature, deformation, etc.

3C Electronics_Sapphire crystal

3C Electronics _ Ink screen

details

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