SuperView W1 for Nano 3D Surface and Form
  • Item No.: W1
    Product name: SuperView W1 for Nano 3D Surface and Form
  • Standard field of view: ( 0.49*0.49 ) mm
    Max field of view: ( 6x6 ) mm
    Reflectivity of test object:0.5 % ~100 %
    Repeatability of Roughness RMS:0.005nm
    Scanning range:≤10mm
    Resolution:0.1nm
    Accuracy of stage measurement:0.3 %
    Repeatability of stage measurement: 0.08% 1σ
    X, Y Object table :
        Size: ( 320x200 ) mm
        Moving range: ( 140x110 ) mm
        Load capacity:10kg
        Control method:Motorized

 

details

§≡≡≡≡  Description  ≡≡≡≡
SuperView W1 Optical 3D Surface profilometer is an ideal instrument for sub-Nanometer measurement of various precision parts. Based on the principle of white light interference technology, combined with precision Z-direction scanning module and 3D modeling algorithm, it contactlessly scans the surface of the object then establish a 3D image for the surface. A serial of 2D, 3D parameters  reflecting surface quality of the object are obtained after XtremeVision software processes and analyzes the 3D image.
 
The SuperView W1 is a user-friendly precision optical instrument with powerful analysis functions for all kinds of surface form & roughness parameters. With unique light source it could measure various precision parts with both smooth and rough surface.
 
§≡≡≡≡  Parameters  ≡≡≡≡
 

Light source

Green LED

Video system

1024×1024

Optical lens

10×50× ,(Optional 2.5×5×20×100×)

Optical zoom

1×(Optional 0.5×0.75×)

Lens holder

3 holes-manual

XY Object table

Size

200×200mm

Moving range

100×100mm(Customization is supported)

Loading capacity

10kg

Control method

Motorized

Tilt

±4°Manual

Z Axis focusing

Moving range

100mm

Control method

Motorized

Scanning range of Z axis

2.2mm(bigger range is optional)

Resolution of Z axis

0.1nm

Max scanning speed

30µm/s

Stage measurement

Uncertainty

Repeatability

0.3%

0.08% 1σ

Remark: Performance parameters are tested by using a 4.7µm precision master stage gauge in lab according to ISO 4287 and ISO 25178.

 

Zoom ratio of lens

2.5×

5×

10×

20×

50×

100×

Numerical hole diameter

0.075

0.13

0.3

0.4

0.55

0.7

Optical resolution @550nm(µm)

3.7

2.1

0.92

0.69

0.5

0.4

Depth of focus(µm)

48.6

16.2

3.04

1.71

0.9

0.56

Working distance(mm)

10.3

9.3

7.4

4.7

3.4

2.0

Field H×V

(mm)

Video system

1024×1024

0.5×

3.84×3.84

1.92×1.92

0.96×0.96

0.48×0.48

0.192×0.192

0.096×0.096

0.75×

2.56×2.56

1.28×1.28

0.64×0.64

0.32×0.32

0.128×0.128

0.064×0.064

1×

1.92×1.92

0.96×0.96

0.48×0.48

0.24×0.24

0.096×0.096

0.048×0.048

 

※ Built-in ISO/ASME/EUR/GBT Standards of 2D, 3D parameters: 

2D Parameters

Standard

Parameters

ISO 4287-1997

 

Principal section

Roughness

Waviness

Amplitude

Pp, Pv ,Pz, Pc, Pt,Pa,Pq,Psk,Pku

Rp, Rv ,Rz, Rc, Rt,Ra,Rq,Rsk,Rku

Wp, Wv ,Wz, Wc, Wt,Wa,Wq,Wsk,Wku

interval

PSm,Pdq

RSm,Rdq

WSm,Wdq

Substance

Pmr,Pdc

Rmr,Rdc,Rmr(Rz/4)

Wmr,Wdc,Wmr(Wz/4)

Peak

PPc

RPc

WPc

ISO 13565

ISO 13565-2

Rk,Rpk,Rvk,Mr1,Mr2,A1,A2,Rpk,Rvk

ISO 12085

Roughness graph

R,AR,R× ,Nr

Waviness graph

W,AW,W×,Wte

Other graph

Rke,Rpke,Rvke

AMSE B46.1 

2D

Rt,Rp,Rv,Rz,Rpm,Rma×,Ra,Rq,Rsk,Rku,tp,Htp,Pc,Rda,Rdq,RSm,Wt

DIN EN ISO 4287-2010

Original profile

Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,

Roughness

Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,RPc,Rdq,Rdc,Rmr,

Waviness

Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr

JIS B0601-2013

Original profile

Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,

Roughness

Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr

Waviness

Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr

GBT 3505-2009

Original profile

Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,

Roughness

Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr

Waviness

Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr

 

3D Parameters

Standard

Parameters

ISO 25178

Height

Sq,Ssk,Sku,Sp,Sv,Sz,Sa

function

Smr,Smc,S×p

Space

Sal,Str,Std

Composite parameters

Sdq,Sdr

Volume

Vm,Vv,Vmp,Vmc,Vvc,Vvv

Form

Spd,Spc,S10z,S5p,S5v,Sda,Sha,Sdv,Shv

Functional

Sk,Spk,Svk,Smr1,Smr2,Spq,Svq,Smq

ISO 12781

Flatness

FLTt,FLTp,FLTv,FLTq

EUR 15178N

Amplitude

Sa,Sq,Sz,Ssk,Sku,Sp,Sv,St

Space

Str,Std,Sal

Composite parameters

Sdq,Sds,Ssc,Sdr,Sfd

Area, Volume

Smr,Sdc

Function

Sk,Spk,Svk,Sr1,Sr2,Spq,Svq,Smq

Functional

Sbi,Sci,Svi

EUR 16145 EN

Amplitude

Sa,Sq,Sy,Sz,Ssk,Sku

Mixed parameters

Ssc,Sdq,Sdr

Functional

Sbi,Sci,Svi,Sk,Spk,Svk

Space

Sds,Std,Stdi,Srw,Srwi

Hardness

Hs,Hvol,Hv,Hps,Hpvol,Hpv,Hap,Hbp

ASME B46.1

3D

St,Sp,Sv,Sq,Sa,Ssk,Sku,SWt

 

§≡≡≡≡  Applications  ≡≡≡≡

It is used for measurement and analysis of surface roughness and profile of precision components from industries of semi-conductor, 3C Electronics, ultraprecise machining, optical machining, micro-nano materials, micro-electro-mechanical system.

 

Measurement and analysis for various products, components and materials`surface form and profile characteristics, such as flatness, roughness, waviness, appearance, surface defect, abrasion,corrosion, gap, hole, stage, curvature, deformation, etc.

 

3C Electronics_Sapphire crystal

 

3C Electronics _ Ink screen

 

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