| Model No. | NS200 | NS200-D | |
| Sample Observation | Front View Navigation | 5MP Colorful Camera F.O.V. : 2.2x1.7mm | 5MP Colorful Camera F.O.V. : 10x13.4mm |
| Side View Navigation | / | 5MP Colorful Camera F.O.V. : 2x2.68mm | |
| Sensor | Ultra Low Inertia, LVDC Sensor | ||
| Measuring Force | 1-50mg Adjustable | ||
| Stylus | Tip radius 2μm , angle 60° | ||
| XY Travel Range | Motorized X/Y(150mm×150mm), manually adjustable leveling | ||
| Sample R-θ Stage | Motorized, 0~360°, continuous rotation | ||
| Vacuum Chuck | 6-inch vacuum chuck | ||
| Single Scan Length | 55mm | ||
| Max Scanning Range | 150(XY travel) + 55mm scanning range, max range is 8 inches | ||
| Max Sample Height | 50mm | ||
| Max Wafer Size | 200mm(8”) | ||
| Step Height Repeatability*1 | 5 Å @ Range 330μm/ 10 Å @ Range 1mm (Measure step height 1μm, 1δ) | ||
| Sensor Range*2 | 330μm or 1050μm | ||
| Scanning Speed | 2μm/s~10mm/s | ||
| Max Scan Sampling Points | 12000 | ||
| Size(L×W×H) | 640×610×500mm | 640x650x530mm | |
| Weight | 40kg | ||
| Input | AC100~240V, 50/60 Hz, 200W | ||
| Working environment | Humidity: 30~40% RH(No condensation), Temp.: 16~25°C(Fluctuation < 2°C/h), Ground vibration: 6.35μm /s(1~ 100Hz), Audio noise: ≤80dB, Air laminar flow: ≤ 0.508 m/s(Downward flow) | ||
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