| Model No. | CP200 | |
| Measurement technology | Stylus Scanning | |
| Navigation Camera | 5MP pixels colorful camera, FOV 2200×1700μm | |
| Sensor | Ultra Low Inertia, LVDC Sensor | |
| Measuring Force | 1-50mg Adjustable | |
| Stylus | Tip radius 2μm , angle 60° | |
|
Object Table |
XY Travel Range | 150mm×150mm, Motorized |
| Rotation | 0~360°, Motorized | |
| Max Scanning Length | 55mm | |
| Max Sample Height | 50mm | |
| Max Wafer Size | 150mm(6”), 200mm(8”) | |
| Step Height Repeatability | 5 Å @ Range 330μm/ 10 Å @ Range 1mm (Measure step height 1μm, 1δ) | |
| Sensor Range*1 | 330μm or 1mm | |
| Vertical Resolution | Resolution<0.01 Å(When the grade is 13μm) | |
| Scanning Speed | 2μm/s~10mm/s | |
| Size(L×W×H) | 640×626×534mm | |
| Weight | 40kg | |
| Input | AC100~240 V, 50/60 Hz, 200W | |
| Working environment |
Humidity: 30~40% RH(No condensation), Temp.: 16~25°C(Fluctuation < 2°C/h), Audio noise: ≤80dB Ground vibration: 6.35μm /s(1~ 100Hz), Air laminar flow: ≤ 0.508 m/s(Downward flow) |
|
| *1 The sensor range can only be selected either 330μm or 1mm | ||
