Benchtop Scanning Electron Microscope CEM3000A is a precision instrument designed for microscale morphology observation and analysis of material surfaces. Equipped with a secondary electron probe and a backscattered electron probe, it supports both high vacuum and low vacuum modes, enabling high-precision scanning to capture clear morphological images with deep field of view, high resolution, and high contrast for various types of material surfaces. When used in conjunction with an energy dispersive spectrometer, it can also obtain information on the elemental composition of materials.
| Product Model | CEM3000A | |
| Electron Gun | Filament | Tungsten Filament |
| Resolution | Better than 4nm (SE), better than 8nm (BSE) @20kV | |
| Accelerating Voltage | 1 ~ 20kV | |
| Magnification | Electron Image, 40 ~ 300,000× (Large area stitching is optional) | |
| Detectors | Secondary Electron (SE) | Standard |
| Backscattered Electron (BSE) | Standard (4-quadrant high-resolution probe) | |
| Energy Dispersive Spectrometer (EDS) | Bruker or Oxford (Optional) | |
| Automation Software | Auto alignment, Auto focus, Auto stigmation, One-click image enhancement | |
| Vacuum System | Vacuum Level | High Vacuum, Better than 9×10⁻³ Pa |
| Low Vacuum, 5 ~ 100 Pa (Optional) | ||
| Pumping Time | Low Vacuum Mode: < 180s | |
| Low Vacuum Mode: < 120s | ||
| Sample Changeover Time | Vacuum discharge: < 30s | |
| Vacuum re-pumping: < 100s | ||
| Object Table | Motorized Axes | X, Y, T |
| Manual Axes | R, Z | |
| Travel Range | X: 50mm | |
| Y: 50mm | ||
| R: 0°~360° (Manual rotation, E-beam rotation) | ||
| T: -22.5°~ +22.5° | ||
| Z: 45mm | ||
| Max. Sample Size | 70mm × 70mm(Horizontal) | |
| 45mm(Height) | ||
| In-Chamber Cameras | Navigation Camera(Top-View) | Standard high-resolution colorful camera |
| Side-View Camera | Standard high-resolution IR camera | |
| Operating System | Windows 10 / 11 (64bit) | |
| Image Size | 640×480, 1280×960, 2560×1920, 5120×3840, 10240×7680 | |
| Weight | 120kg | |
| Size (W×L×H) | 400×670×730mm | |
| Input | 200-240VAC, 50/60Hz, 800W | |
| Operating Environment | Working Temp.: 15°C~30°C, fluctuation < 1°C/15min | |
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Relative Humidity: <65%, no condensation |
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Benchtop Scanning Electron Microscope CEM3000A can meet users' expansive needs by equipping with various probes and accessories. With its unique anti-vibration and anti-magnetic technology, this model of benchtop electron microscope exhibits strong anti-vibration and anti-noise capabilities, enabling it to be widely used in multiple fields such as materials science, life sciences, nanotechnology, and energy.
