Confocal Microscope VT6200 is dedicated for micro-nano level measurement of various precision components and material surfaces. It can measure the surface of various objects from smooth to rough, low reflectivity to high reflectivity, and the roughness, flatness, micro-geometric profile, curvature, etc.Total more than 300 kinds of 2D and 3D parameters as per four major domestic and foreign standards ISO/ASME/EUR/GBT are provided as evaluation standards
The joystick integrated with the displacement adjustment functions in the three directions of X, Y, and Z can quickly complete the pre-measurement works such as stage translation and 2-way focusing etc.
In addition to the software ZSTOP setting the lower limit of the Z-direction displacement for anti-collision protection, a mechanical and electronic sensor is designed on the Z-axis. When the lens touches the surface of the sample, the instrument automatically enters an emergency stop state to protect the instrument to the greatest extent and reduce the risk of human operation
Model No. | VT6200 | |
Travel Range |
X | 200mm |
Y | 200mm | |
Z | 100mm | |
Size | 720×580×1500mm | |
Weight | 400kg | |
Principle | Spinning disk confocal optical system | |
Objective Lens | 50×(Optional: 10×, 20×, 100×) | |
Field of View | 120×120 μm~1.2×1.2 mm | |
Step Height Measurement |
Repeatability(1σ) | 12nm |
Accuracy*1 | ± (0.2+L/100) μm | |
Display Resolution | 0.5nm | |
Width Measurement |
Repeatability(1σ) | 40nm |
Accuracy*2 | ± 2% | |
Display Resolution | 1nm | |
XY Object Table |
Load Capacity | 10kg |
Control Method | Motorized | |
Z-Axis Stroke Scanning Range | 10 mm | |
Lens Turret | Motorized 5 holes turret | |
Light Source | White LED | |
Operating Environment |
Power Supply | 100~240V AC, 50/60Hz, 2A, Power 300W |
Working Temp. | 15℃~30℃, fluctuation < 2℃/60min | |
Humidity | 5%~95%RH, no condensation | |
Vibration | VC-C or better | |
Other | No strong magnetic field | |
*1 Measure standard 4.7μm steps height block by 50× Objective lens in a laboratory environment *2 Measure standard engraved line block by 50× Objective lens in a laboratory environment |
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